Pfeiffer Vacuum’s new HiQuad Neo mass spectrometer combines powerful performance with flexibility and user-friendly operation.

The mass spectrometer achieves a measuring speed of up to 125 μs/u, with outstanding sensitivity and a wide dynamic range. Depending on the application, different mass ranges, rod diameters, ion sources, detectors, interfaces and cable lengths are available for selection. Its properties make the HiQuad Neo particularly suitable for applications in research and development, integration into analytical systems as well as cleanliness verification for EUV-lithography.

Previous-generation devices can be upgraded to match Pfeiffer Vacuum's latest HiQuad Neo technology. It is also possible to re-use existing components, such as the analyzer. This minimizes both expense and waste.

The mass spectrometer is easy to operate with the PV MassSpec software. This provides a clear, user-friendly platform for recording and presenting measured data as well as parameter settings. The integrated sequencer enables easy automated programming of entire measuring procedures. One click is all that is needed to perform leak detection and vacuum diagnosis.

The software also permits automated calibration and tuning. Defining measurement recipes is easy, and it is possible to link the mass spectrometer data to external signals. Alternatively, direct communication via the ethernet interface (via OPC-UA) is possible. These features provide an efficient, user-friendly solution for a wide range of applications.

Image: HiQuad Neo from Pfeiffer Vacuum.